The Calibration Laboratories for Nano Inspection Technology
ITRC provides nano-scale inspection service. “SEM Calibration Laboratory” and “SPM Calibration Laboratory” of Instrument Technology Research Center have received certificates (Certificate number: L1957−080715 and L1958−080725) of calibration from Taiwan Accreditation Foundation (TAF), and can now provide calibration services according to ISO 17025 standard requirements.
These two laboratories have adopted Veeco di Dimension 3100 SPM system and Hitachi S-4300 SEM system to provide pitch standard calibration in the range of 100 nm − 10,000 nm and 80 nm − 2,000 nm respectively. The systems are applicable to users equipped with microscopes which require transfer standards to be traced and reference materials to be calibrated regularly. SEM Calibration Laboratory is presently the first TAF certified calibration laboratory in its field. We provide services to industries, the academia and research institutes for traceable calibration of measurement equipments. Certified items will be expanded in the future including magnification standards, step-height standards, roughness standards, electrical properties, magnetic properties and mechanical properties. By further expanding the field of services which can help to promote the quality and technical ability of domestic testing laboratories, our public reliability and technical competitiveness can be therefore enhaced.
2009/8/14 updated
