Micro Tunable-Vertical-Grating
Introduction
A novel Tunable-Vertical-Grating, based on the Optical-MEMS technology, is being developed. By linearly modulating the pitch, the grating exhibits various dispersion effects accordingly. Without the complexity encountered in rotary gratings, it is easy to tune the range of the dispersed spectrum of interest. An effort in alignment and assembly can also be reduced significantly.
Technology
SEM picture of Micro Tunable-Vertical-Grating
- Design of the tunable grating and bistable mechanism
- Technology of large displacement actuators
- Design of the grating and optical path system
- Fabrication of the MEMS chip
Specification
- Ptich range: 5 – 12 µm (typical)
- Grating depth: 100 µm (typical)
- Blaze angle: arbitrary
- Driving current: 0 – 200 mA (typical)
- Wavelength: VIS, IR
Application
- Spectroscopy: micro spectrometer, micro monochrometer
- Optical communication: tunable filter, external cavity tunable laser and (de)multiplexer
