Scanning Probe Microscop
Introduction
ITRC has been developing the technologies of Nano-scale surface analysis for nearly a decade. These nano technologies involve an integration of magnetism, mechanics, optics and electronics. Technical services are provided to the academic and industrial researches for the demand of material development, surface properties inspection and efficiency improvement of components.
Technology
Magnetic Force Microscopy (MFM), Lateral Force Microscopy (LFM), force modulation, phase imaging, Electric Force Microscopy (EFM), Surface Potential Microscopy (SpoM), Conductive Atomic Force Microscopy (CAFM), straight and bend optical fiber probe fabrications, reflection and transmission Near Field Scanning Optical Microscopy.
Specification
- Sample size (max.) φ 200 mm, 12 mm thick
- 100 µm square X-Y imaging area, 4 µm Z range
- Atomic resolution
- Repeatable, non-destructive
Application
- Surface property studies for material development
- 3D analysis for micro and nano structures
- TCO film (ITO, IZO) surface electrical characterization (TCO: transparent conductive oxides)
- Nano-scale array application research
- Near field imaging and spectrum analysis
- Nano-line fabrication (line width < 50 nm)
