Spectra-Based In-situ Leakage Detector
Test setup of leakage detector
Introduction
This detector measures the intensity at the characteristic wavelength of cold cathode gauges in the vacuum chamber. It can monitor the leakage condition of chambers in real time. It also gives a quantitative value or an alarm of leakage with respect to different chamber pressure ranges.
Technology
- Real-time leakage inspection
- Non-invasion monitor
Specification
- Quantitative inspection: 10−3 – 10−7 Torr
- Qualitative inspection: > 10−3 Torr
Application
- Semiconductor equipments
- Vacuum chambers
n example of relative spectral intensity of cold cathode gauge in chamber
