Electron-Beam Gun Evaporation Method with Ion-Assisted Deposition
Introduction
Large-scale optical film evaporation system
Night vision goggle lens
Ion-assisted deposition (IAD) systems have been developed for optical multi-layer thin film deposition. Such kinds of systems include two sets of electron beam evaporation sources (10 kV), IAD with high power, high vacuum cryo-pump system, wide band (350 – 1100 nm) and high precision optical monitor for multi-layer optical filter automatic control. Besides, IAD technology has been applied to deposit thin films on plastic substrates.
Technology
- High vacuum system technology
- Ion-assisted electron-beam evaporation
- Diverse optical filter coating: high-reflection mirror coating, antireflection coating, band-pass filter, edge filter, dichroic filter, color filter, cold mirror, heat mirror
- Low-temperature deposition
Specification
- Automatic optical monitoring system for 99-layer optical filter
- Monitoring wavelength between 350 nm – 1100 nm
- For nonquarterwave and quarterwave film thickness
Application
- Semiconductor and optoelectronic related devices
- Optical thin film coating related industry
- Main components of optical system
High-precision optical film evaporation system
Diverse optical filter
