Vacuum System Technical Service

Coating system maintenance

CVD system design
Introduction
In order to maintain the domestic instrument resources and carry out instrument research and development, ITRC provides vacuum system maintenance services. We have also developed all kinds of essential components and system technologies.
Technology
- Vacuum system design and assembly
- Vacuum materials and components manufacturing
- Vacuum system maintenance
Application
- Cryo pump
- Diffusion pump
- Positive displacement rotary pump
- Electron microscope
- Mass flow controller
- GC/MS

Laser coating system design

Thermal-treatment oven maintenance

OLED coating system design

Oven component design