Vacuum Standard Laboratory
Introduction
The Vacuum Standard Laboratory has received the vacuum calibration registration in CNLA. We provide the calibration service for vacuum pressure, gas flow, micro flow, and leak rate that conform to the ISO/IEC 17025 quality system.
Technology
The Vacuum Standard Laboratory is a fully-equipped calibration laboratory.
Vacuum gauge
Gas flow meter
Micro flow meter
Leak rates
Specification
| Registration items | Ranges | Best measurement capability recognized |
|
|---|---|---|---|
| Item | Calibration items | ||
| KD2002 Ionization Vacuum Gauge |
Vacuum Gauge |
1.33E−04 Pa to 1.06E−03 Pa 1.33E−03 Pa to 1.06E−02 Pa 1.33E−02 Pa to 6.67E−02 Pa |
(4.8E−6+0.08992X) Pa (1.1E−5+0.08920X) Pa (5.2E−6+0.08708X) Pa (X = Calibration point) |
| KD2003 Capacitance Diaphragm Vacuum Gauge |
Vacuum Gauge |
1.33E−01 Pa to 1.06E+00 Pa 1.06E+00 Pa to 1.06E+01 Pa 1.06E+01 Pa to 1.06E+02 Pa 1.06E+02 Pa to 1.06E+03 Pa 1.06E+03 Pa to 1.06E+04 Pa 1.06E+04 Pa to 9.99E+04 Pa |
(4.1E−3+0.01592X) Pa (−3.5E−4+0.01925X) Pa (−4.7E−+0.02063X) Pa (3.8E−1+0.01934X) Pa (−3.6E−1+0.02006X) Pa (−2.6E+0+0.01972X) Pa (X = Calibration point) |
Application
- To establish and disseminate the vacuum calibration technique
- To promote the vacuum technology for industries
