Thin Film Measuring Systems

Scratch test

Alpha-step 200
Introduction
To characterize the physical, chemical and mechanical properties of thin film, a series of thin film measuring and analysis systems have been established, including high resolution X-ray diffractometer, spectroellipsometer, surface topography measurement, four-point probe measuring system, spectrometer, scratch test and prism coupler. We offer services to high technology industries and academic research institutions.
Technology
- Optical properties analysis
- Optico-electrical properties analysis
- Mechanical properties analysis
- Crystallinity analysis
Specification
According to each instrument specification
Application
- Thin film thickness, refractive and extinction coeffient measurement
- Measurement of TCO (ITO, IZO) films and LED
- Surface roughness, adhesion and stress analysis
- X-ray crystal structure and component analysis

High resolution x-ray diffractometer

Spectroellipsometer

Surface topography measuring system

Four-point probe measuring system

Prism coupler

Spectrometer