Research Projects
Nano/Micro System Technology
- Oxide Etching Technology
- Near-field Scanning Optical Microscopy
- Miniaturized Microorganism Detection System
Precision Optical Thin-film Equipment & Process
- Development of CMOS Image Sensor
- Development of Optical Monitor System
- Development of New Type Transparent Conductive Oxide Films
Equipment & Process Technolgoy for Nano/Micro Device
- Chemical Beam Exitaxial System
- Pulsed Laser Deposition
- Atomic Layer Deposition
- Nanosphere Lithography Technology
