Nano/Micro System Technology
Near-field Scanning Optical Microscopy
Purpose
- Establishment of near-field scanning optical microscope.
- Development of near-field optical probe.
Specifications & Features
- 3D topography imaging of nanostructures
- Near-field optical image, spatial resolution ~50 nm
- Nano-optical spectroscopy
Applications
- Nano-optical measurement
- Near-field imaging spectroscopy
- Near-filed optical nanolithography
Near-field scanning optical microscope (Veeco Aurora 3)
NSOM fiber tip in ITRC
Contact
Fu-Han Ho
E-mail: fuhanho@itrc.org.tw
