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Precision Optical Thin-film Equipment & Process

Development of Optical Monitor System

User friendly and multifunction interface
User friendly and multifunction interface

Color filter
Color filter

Purpose

There are two methods for determining cutpoint during optical coating process: quartz crystal monitoring and opticaling. Quartz crystal measures the deposited mass typical accuracy ±1%. Optical monitoring measurement the true optical thickness, achievable repeatability ±0.01%. ITRC developed Optical Monitor System (OMS) for high-precision and stable coating process.

Specifications & Features

Applications

Reproducibility of color filter by OMS
Reproducibility of color filter by OMS
Coating results as good as the theoretical design
Coating results as good as the theoretical design

Contact

Yung-Hsin Chang
E-mail: ben@itrc.org.tw