Research and Development
Micro-interferometer Testing System
Micro Total Analysis System (µTAS)
Pulsed Laser Deposition System
Several years ago, this Center had established distinctive core technologies for electro-optical systems, vacuum technology, precision measurement and control, opto-electro-mechanical system integration and so on. Given the above, to further upgrade Taiwan's academic research and cutting-edge industrial technologies, we outlined our R&D initiatives to develop leading technologies in fields like electro-optical remote sensing, MEMS, vacuum systems & deposition techniques and son on. To meet both academic and industrial demands, the Center focuses on providing the following services: a technical service system, information on scientific instruments, hi-tech professional training and entrusted instrument manufacturing and maintenance. In aiming to provide outstanding technologies and services, we strive to promote the effective use of Taiwan's technological development resources.
Performance Evaluation System of Vacuum Pumps
Organic Light Emitted Diode Thermal Evaporator
In-situ Micro-spectro Sensor
Cutting-edge Technologies
This Center has remote sensing technology, nano technology, vacuum & thin film technology laboratories for studying cutting-edge technology in accordance with the national science and technology policy. Recently, this Center has accomplished vegetation and change detection imager (VCDi), micro total analysis system (µTAS), micro-spectro sensor and so on. Also, this Center has been actively cooperating with famous international scientific organizations for the development of precision instruments and the upgrade of instrument technologies.
RGB and False Color Images of Tungshih Area
Stereo Image of Jiji Town
Remote Sensing Technology
Technical Capabilities
Results of Research
Future Targets
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 Porottype of Hyperspectral Imager |
Vegetation and Change Detection Imager
Photometer and Imager System
Micro-spectrometer for YamSat
Nano/Micro Technology
Technical Capabilities
Results of Research
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 NEMS/MEMS System |
Future Target
- To develop nano/micro technology and optical MEMS system for applications in biomedicine, optoelectronics, aerospace and environment protection.
Dual Beam (focused ion beam & electron beam) System
Field Emission Scanning Electron Microscope
Electron Beam Lithography System
Inductively Coupled Plasma Reactive Ion Etching
Vacuum Technology
Technical Capabilities
- Deposition system and technology for optical thin films used in aerospace applications
- Mass flow rate and CNLA vacuum system pressure certification
- Thin film characteristic measurement
- Troubleshooting and leakdetection of vacuum system
Results of Research
- Dry vacuum pump TBP-08
- The ferroelectric thin films grown by pulsed laser deposition system
- Nanosphere lithography technique
- Low temperature transparent conductive oxide thin film technique
- High vacuum calibration system using orifice-flow technique
- In-situ micro-spectro sensor for the leakage of semiconductor process chamber
- UHV chemical beam epitaxy system for III-V nitride compound semiconductors
Future Targets
- Optical thin films of high resolution optic-electrical image modules
- Development of high vacuum systems
- Development of process and characterization techniques of nanostructured materials and functional devices
High Vacuum Calibration and Measurement System
Optical Coating System
IAD Multi-target Co-sputtering System
Interference Phase Shifting Thin Film Stress Measurement System
