Director General Tsai's Proclamation Ceremony
From October of 2007, the Instrument Technology Research Center (ITRC) under the National Applied Research Laboratories (NARL) has been looking for nominee for the position of Director General. After 5 months of rigid selection process, the board of directors of NARL has finally resolved to cordially invite Dr. Din-Ping Tsai to fill the coveted position of director general of ITRC. His proclamation ceremony was held on March 27.
Director General Tsai serves concurrently the Distinguished Professor of Department of Physics at National Taiwan University. He received his Ph. D degree in Physics from University of Cincinnati, USA in 1990. He was elected as the chair and vice chair of the International Society for Optical Engineering (SPIE) Taiwan chapter for the 2004 & 2005 and 1996 & 1997, respectively. He was invited to join Research Center for Applied Sciences, Academia Sinica as an Adjunct Research Fellow in 2006. He is a Fellow of International Society of Optical Engineering (SPIE), Optical Society of America (OSA), American Physical Society (APS), and Physics Society of R.O.C., and a Senior Member of IEEE. He is a member of technical committee of IEEE/LEOS nanophotonics. He is also a member of the OSA Fellows and Honorary Members Committee.
Atomic Layer Deposition
An Enabling Technology for the Next-generation Microelectronic Device
Instrument Technology Research Center (ITRC), affiliated to National Applied Research Laboratories (NARL), has successfully developed a process, called atomic layer deposition (ALD), to grow thin film atom by atom. The excellent thickness control, uniformity and step coverage make ALD an enabling technology for next-generation microelectronic device.
Based on the long-established knowledge of vacuum technology, ITRC has successfully developed the 4 and 8 inch ALD systems. Advanced researches on high-k dielectrics for MOSFET, and transparent conducting oxides for optoelectronic device and solar cell are undergoing. We are looking forward to more cooperation with academic and industrial fields in semiconductor, optoelectronic and energy.
